Toughening Thin-Film Structures with Ceramic-Like Amorphous Silicon Carbide Films
Article first published online: 25 JUL 2013
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 10, Issue 2, pages 253–257, January 29, 2014
How to Cite
Matsuda, Y., Ryu, I., King, S. W., Bielefeld, J. and Dauskardt, R. H. (2014), Toughening Thin-Film Structures with Ceramic-Like Amorphous Silicon Carbide Films. Small, 10: 253–257. doi: 10.1002/smll.201300130
- Issue published online: 23 JAN 2014
- Article first published online: 25 JUL 2013
- Manuscript Received: 14 JAN 2013
- US Department of Energy. Grant Number: DE-FG02–07ER46391
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