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Keywords:

  • pressure sensor;
  • contact resistance;
  • micropillar array;
  • conductive polymer
Thumbnail image of graphical abstract

A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.