Development of µGC (micro gas chromatography) with high performance micromachined chip column

Authors

  • Masanori Nishino,

    Non-member, Corresponding author
    1. Technology Research Laboratory, Shimadzu Corporation, 3-9-4, Hikaridai, Seikacho, Soraku-gun, Kyoto 619-0237, Japan
    • Technology Research Laboratory, Shimadzu Corporation, 3-9-4, Hikaridai, Seikacho, Soraku-gun, Kyoto 619-0237, Japan
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  • Yusuke Takemori,

    Non-member
    1. Analytical and Measuring Instruments Division, Shimadzu Corporation 1, Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
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  • Satoshi Matsuoka,

    Non-member
    1. Technology Research Laboratory, Shimadzu Corporation, 3-9-4, Hikaridai, Seikacho, Soraku-gun, Kyoto 619-0237, Japan
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  • Masaki Kanai,

    Member
    1. Technology Research Laboratory, Shimadzu Corporation, 3-9-4, Hikaridai, Seikacho, Soraku-gun, Kyoto 619-0237, Japan
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  • Takahiro Nishimoto,

    Member
    1. Technology Research Laboratory, Shimadzu Corporation, 3-9-4, Hikaridai, Seikacho, Soraku-gun, Kyoto 619-0237, Japan
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  • Masahito Ueda,

    Non-Member
    1. Analytical and Measuring Instruments Division, Shimadzu Corporation 1, Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan
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  • Kyoichi Komori

    Non-member
    1. Marketing Division, Shimadzu Corporation 1-4, Kandanishinocho, chiyoda-ku, Tokyo 101-0054, Japan
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Abstract

A micro gas chromatography (µGC) instrument applying a high performance chip column fabricated on a silicon wafer was developed. Experimental results of the chip column and protyping of a µGC instrument are described. Approximately 35 000 theoretical plates were generated with the chip column coated liquid phase (5% phenyl-/95% dimethyl-polysiloxane). The theoretical plates of the chip column were close to those of the capillary column. Experimental minimum height equivalent to a theoretical plate (HETP, Hmin) of the chip column was 1.2 times higher than the calculated Hmin. A prototype µGC applying the chip column was developed. The µGC generated approximately 35 000 theoretical plates, similar to the theoretical plates obtained by a commercial GC instrument. Copyright © 2009 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

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