Special Issue Paper / Special Issue on State-of-the-Art MEMS Technologies
Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics
Article first published online: 16 FEB 2010
Copyright © 2010 Institute of Electrical Engineers of Japan
IEEJ Transactions on Electrical and Electronic Engineering
Special Issue: Special Issue on State-of-the-Art MEMS Technologies / Special Issue on Electronics, Information and Systems
Volume 5, Issue 2, pages 131–136, March 2010
How to Cite
Sasaki, M., Hane, K., Briand, D., Noell, W. and de Rooij, N. F. (2010), Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics. IEEJ Trans Elec Electron Eng, 5: 131–136. doi: 10.1002/tee.20507
- Issue published online: 16 FEB 2010
- Article first published online: 16 FEB 2010
- Manuscript Revised: 26 SEP 2009
- Manuscript Received: 26 JUN 2009
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