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Keywords:

  • MEMS;
  • resonator;
  • frequency tuning;
  • multiband

Abstract

We have developed a new MEMS (microelectromechanical system) resonator with a digitally tunable resonant-frequency function. A 20-µm-thick silicon main beam, 10 × 760 µm, has multiple sets of 20-µm-thick short beams, 10 × 100 µm, along the longitudinal direction. The bending of the short beams exerts a moment on the main beam. The frequency of the maximum amplitude in the main beam has been measured to vary at 85.5, 223, and 400 kHz by selecting three sets of exciting electrodes. The resonator has been measured to have Q-factor of higher than 10 000 under vacuum. The frequency can be easily increased up to several tens of megahertz by reducing the device size. Therefore, this new resonator should be useful for wide multiband frequency applications. Copyright © 2010 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.