Presently with Olympus Corporation, Hachioji, Japan.
Special Issue Paper / Special Issue on State-of-the-Art MEMS Technologies
Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning
Article first published online: 16 FEB 2010
Copyright © 2010 Institute of Electrical Engineers of Japan
IEEJ Transactions on Electrical and Electronic Engineering
Special Issue: Special Issue on State-of-the-Art MEMS Technologies / Special Issue on Electronics, Information and Systems
Volume 5, Issue 2, pages 164–170, March 2010
How to Cite
Tanigawa, H., Makita, S. and Suzuki, K. (2010), Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning. IEEJ Trans Elec Electron Eng, 5: 164–170. doi: 10.1002/tee.20512
- Issue published online: 16 FEB 2010
- Article first published online: 16 FEB 2010
- Manuscript Revised: 9 SEP 2009
- Manuscript Received: 1 JUL 2009
- frequency tuning;
We have developed a new MEMS (microelectromechanical system) resonator with a digitally tunable resonant-frequency function. A 20-µm-thick silicon main beam, 10 × 760 µm, has multiple sets of 20-µm-thick short beams, 10 × 100 µm, along the longitudinal direction. The bending of the short beams exerts a moment on the main beam. The frequency of the maximum amplitude in the main beam has been measured to vary at 85.5, 223, and 400 kHz by selecting three sets of exciting electrodes. The resonator has been measured to have Q-factor of higher than 10 000 under vacuum. The frequency can be easily increased up to several tens of megahertz by reducing the device size. Therefore, this new resonator should be useful for wide multiband frequency applications. Copyright © 2010 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.