High-Speed and Wide-Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation
Version of Record online: 20 APR 2010
Copyright © 2010 Institute of Electrical Engineers of Japan
IEEJ Transactions on Electrical and Electronic Engineering
Special Issue: Special Issue on Energy Saving Technologies on Electric Railways in Japan
Volume 5, Issue 3, pages 361–368, May 2010
How to Cite
Iseki, T., Okumura, M. and Sugawara, T. (2010), High-Speed and Wide-Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation. IEEJ Trans Elec Electron Eng, 5: 361–368. doi: 10.1002/tee.20542
- Issue online: 20 APR 2010
- Version of Record online: 20 APR 2010
- Manuscript Revised: 23 MAR 2009
- Manuscript Received: 6 JAN 2009
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