Fabrication of Deep Silicon Microstructures by the Combination of Anodization and p++ Etch Stop
Article first published online: 18 JUN 2010
Copyright © 2010 Institute of Electrical Engineers of Japan
IEEJ Transactions on Electrical and Electronic Engineering
Special Issue: Special Issue on 2008 International Symposium on Electrical Insulating Materials
Volume 5, Issue 4, pages 493–497, July 2010
How to Cite
Ohno, T., Tanaka, S. and Esashi, M. (2010), Fabrication of Deep Silicon Microstructures by the Combination of Anodization and p++ Etch Stop. IEEJ Trans Elec Electron Eng, 5: 493–497. doi: 10.1002/tee.20563
- Issue published online: 18 JUN 2010
- Article first published online: 18 JUN 2010
- Manuscript Revised: 8 NOV 2009
- Manuscript Received: 22 JUN 2009
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