We solve for the slip rate distribution on the Hayward fault by performing a least squares inversion of geodetic and seismic data sets. Our analysis focuses on the northern 60 km of the fault. Interferometric synthetic aperture radar (InSAR) data from 13 independent ERS interferograms are stacked to obtain range change rates from 1992 to 2000. Horizontal surface displacement rates at 141 bench marks are measured using GPS from 1994 to 2003. Surface creep observations and estimates of deep slip rates determined from characteristic repeating earthquake sequences are also incorporated in the inversion. The fault is discretized into 283 triangular dislocation elements that approximate the nonplanar attributes of the fault surface. South of the city of Hayward, a steeply, east dipping fault geometry accommodates the divergence of the surface trace and the microseismicity at depth. The inferred slip rate distribution is consistent with a fault that creeps aseismically at a rate of ∼5 mm/yr to a depth of 4–6 km. The interferometric synthetic aperture radar (InSAR) data require an aseismic slip rate that approaches the geologic slip rate on the northernmost fault segment beneath Point Pinole, although the InSAR data might be complicated by a small dip-slip component at this location. A low slip rate patch of <1 mm/yr is inferred beneath San Leandro consistent with the source location of the 1868 earthquake. We calculate that the entire fault is accumulating a slip rate deficit equivalent to a Mw = 6.77 ± 0.05 per century. However, this estimate of potential coseismic moment represents an upper bound because we do not know how much of the accumulated strain will be released through aseismic processes such as afterslip.