SEARCH

SEARCH BY CITATION

References

  • 1
    Aristov, V.V. & Erko, I. (eds) (1994) X.-ray Microscopy IV. Chernogolovka, Russia Bogorodskii Pechatnik. Proc. 4th Int. Conf., Chernogolovka, Russia, September 20–24 1993.
  • 2
    Cheng, P.C. (1987) Recent advances in contact imaging of biological materials. X-Ray Microscopy: Instrumentation and Biological Applications (ed. by P. C. Cheng and G. J. Jan), pp. 65 104. Springer-Verlag, Berlin.
  • 3
    Cheng, P.C., Feder, R., Shinozaki, D.M., Tan, K.H., Eason, R.W., Michette, A., Rosser, R.J. (1986) Soft x-ray contact microscopy. Nucl. Instrum. Methods Phys. Rev. A246, 668 674.
  • 4
    Collier, R.J., Burckhardt, C.B., Lin, L.H. (1971) Optical Holography. Academic Press, New York.
  • 5
    Cosslett, V.E. & Nixon, W.C. (1960) X-ray Microscopy. Cambridge University Press, London.
  • 6
    Cotton, R.A., Dooley, M.D., Fletcher, J.H., Stead, A.D., Ford, T.W. (1992) Atomic force microscopy employed as the final imaging stage for soft x-ray microscopy. Soft X-ray Microscopy, Vol. 1741, pp. 204 212. Bellingham, Washington. Society of Photo-Optical Instrumentation Engineers (SPIE).
  • 7
    Cotton, R.A., Tomie, T., Shimizu, H., Jajima, T., Miura, E., Stead, A.D., Ford, T.W. (1994) A study of the factors affecting the resolution in soft x-ray microscopy. X-ray Microscopy IV, pp. 450 454. Chernogolovka, Russia Bogorodskii Pechatnik. Proc. 4th Int. Conf., Chernogolovka, Russia, 20–24 September 1993.
  • 8
    Cowley, J.M. & Moodie, A.F. (1957) Fourier images the out of focus patterns. Proc. Phys. Soc., B, 70, 497 504.
  • 9
    Early, K., Schattenburg, M.L., Smith, H.I. (1990) Absence of resolution degradation in x-ray lithography for λ from 4.5 nm to 0.83 nm. Microelectron. Engng, 11, 317 321.
  • 10
    Feder, R. (1970) X-ray projection printing of electrical circuit patterns. IBM Technical Report TR 22.1065, IBM Components Division, East Fishkill Facility, Hopewell Junction, NY.
  • 11
    Feder, R., Sayre, D., Spiller, E., Topalian, J., Kirz, J. (1976) Specimen replication for electron microscopy using x rays and x-ray resist. J. Appl. Phys. 47, 1192 1193.
  • 12
    Feder, R., Spiller, E., Topalian, J., Broers, A.N., Gudat, W., Panessa, B.J., Zadunaisky, Z.A., Sedat, J. (1977) High-resolution soft x-ray microscopy. Science, 197, 259 260.
  • 13
    Feder, R., Costa, J.L., Chaudhari, P., Sayre, D. (1981) Improved detail in biological soft x-ray microscopy: study of blood platelets. Science, 212, 1398 1400.
  • 14
    Feder, R., Banton, V., Sayer, D., Costa, J., Baldini, M., Kim, B.K. (1985) Direct Imaging of live human platelets by flash x-ray microscopy. Science, 227, 63 64.
  • 15
    Gorby, P. (1913) Une application nouvelle des rayons x: la microradiographie. C. R. Acad. Sci. Paris, 156, 686.
  • 16
    Haller, I., Hatzakis, M., Srinivasan, R. (1968) High-resolution positive resist for electron-beam exposure. IBM J. Res. Dev. 12, 251 256.
  • 17
    Hare, A.R. & Morrison, G.R. (1994) Near-field soft x-ray diffraction modeled by the multislice method. J. Mod. Opt. 41, 31 48.
  • 18
    Hatzakis, M. (1969) Electron resists for microcircuit and mask production. J. Electrochem. Soc. 116, 1033 1037.
  • 19
    Hawryluk, R.J., Smith, H.I., Soares, A., Hawryluk, A.M. (1975) Energy dissipation in a thin polymer film by electron scattering experiment. J. Appl. Phys. 46, 2528 2537.
  • 20
    Henke, B.L. (1981) Low energy x–ray interactions: photoionization, scattering, specular and Bragg reflection. Low Energy X-ray Diagnostics, Vol. 75, pp. 146 155. American Institute of Physics, Monterey, CA.
  • 21
    Henke, B.L., Gullikson, E.M., Davis, J.C. (1993) X–ray interactions: photoabsorption, scattering, transmission and reflection at E = 50–30 000 eV, Z = 1–92 . At. Data Nucl. Data Tables, 54, 181 342.
  • 22
    Howells, M., Jacobsen, C., Kirz, J., Feder, R., McQuiaid, K., Rothman, S. (1987) X-ray holograms at improved resolution: a study of zymogen granules. Science, 238, 514 517.
  • 23
    Howells, M.R., Jacobsen, C.J., Lindaas, S. (1994) X-ray holographic microscopy using the atomic force microscope. X-ray Microscopy IV, pp. 413 427. Chernogolovka, Russia Bogorodskii Pechatnik. Proc. 4th Int. Conf., Chernogolovka, Russia, September 20–24.
  • 24
    Jacobsen, C. (1988) X-ray holographic microscopy of biological specimens using an undulator. PhD thesis, State University of New York, Stony Brook.
  • 25
    Jacobsen, C. & Trebes, J. (1992) Soft X-ray Microscopy, Vol. 1741. Bellingham, Washington. Society of Photo-Optical Instrumentation Engineers (SPIE).
  • 26
    Kado, M., Richardson, M., Gabel, K., Jin, F. (1994) Monochromatic x-ray microscopy in the water window with a compact laser system. Proc. 52nd Annual Meeting of the Microscopy Society of America, pp. 60 61. San Francisco Press, San Francisco.
  • 27
    Khan, M., Mohammad, L., Xiao, J., Ocola, L., Cerrina, F. (1994) Updated system model for x-ray lithography. J. Vac. Sci. Technol. 12, 3930 3935.
  • 28
    Kinjo, Y., Shinohara, K., Ito, A., Nakano, H., Watanobe, M., Horiike, Y., Kikuchi, Y., Richardson, M.C., Tanaka, K.A. (1994) Direct Imaging in a water layer of human chromosome fibres composed of nucleusomes and their higher order structures by laser plasma x-ray contact microscopy. J. Microsc. 176, 63 74.
  • 29
    Kirz, J., Jacobsen, C., Howells, M. (1995) Soft x-ray microscopes and their biological applications. Q. Rev. Biophys. 28, 33 130. Also available as Lawrence Berkeley Laboratory report LBL–36371.
  • 30
    Ladd, W.A., Hess, W.M., Ladd, M.W. (1956) High resolution microradiography. Science, 123, 370 371.
  • 31
    Lindaas, S., Jacobsen, C.J., Howells, M.R., Frank, K. (1992) Development of a linear scanning force microscope for x-ray Gabor hologram readout. Soft X-ray Microscopy, Vol. 1741, pp. 213 222. Bellingham, Washington. Society of Photo-Optical Instrumentation Engineers (SPIE).
  • 32
    London, R.A., Trebes, J.E., Jacobsen, C.J. (1992) Role of x-ray induced damage in biological microimaging. Soft X-ray Microscopy, Vol. 1741, pp. 333 340. Bellingham, Washington. Society of Photo-Optical Instrumentation Engineers (SPIE).
  • 33
    Michette, A.G., Morrison, G.R., Buckley, C.J. (eds) (1992) X-ray Microscopy III, Vol. 67, Springer Series in Optical Sciences, Springer-Verlag, Berlin.
  • 34
    Rosenfield, M.G. (1981) Simulation of developed resist profiles for electron-beam lithography. Technical Report Memorandum no. UCB/ERL M81/40, Electronics Research Laboratory, College of Engineering, University of California at Berkley, Berkley, CA.
  • 35
    Rosser, R.J., Baldwin, K.G., Feder, R., Bassett, D., Coles, A., Eason, R.W. (1985) Soft x-ray contact microscopy with nanosecond exposure times. J. Microsc. 138, 311 320.
  • 36
    Sayre, D., Kirz, J., Feder, R., Kim, D.M., Spiller, E. (1977) Transmission microscopy of unmodified biological materials: comparative radiation dosage with electrons and ultrasoft x-ray photons. Ultramicroscopy, 2, 337 341.
  • 37
    Shattenburg, M.L., Li, K., Shin, R.T., Kong, J.A., Olster, D.B., Smith, H.I. (1991) Electromagnetic calculation of soft x-ray diffraction from 0.1 μm scale gold structures. J. Vac. Sci. Technol. B, 9, 3232 3236.
  • 38
    Shinohara, K. & Ito, A. (1991) Radiation damage in soft x-ray microscopy of live mammalian cells. J. Microsc. 161, 463 472.
  • 39
    Shinohara, K., Aoki, S., Yanagihara, M., Yagishita, A., Iguchi, Y., Tanaka, A. (1986) new, A, approach to the observation of the resist in x-ray contact microscopy. Photochem. Photobiol. 44, 401 403.
  • 40
    Shinozaki, D.M. (1988) High resolution image storage in polymers. X-Ray Microscopy II, Vol. 56, Springer Series in Optical Sciences, (ed. by D. Sayre, M. R. Howells, J. Kirz and H. Rarback), pp. 118 123. Springer-Verlag, Berlin.
  • 41
    Skinner, C.H., DiCicco, D.S., Kim, D., Rosser, R.J., Suckewer, S., Gupta, A.P., Hirschberg, J.G. (1990) Contact microscopy with soft x-ray laser. J. Microsc. 159, 51 60.
  • 42
    Solem, J.C. (1986) Imaging biological specimens with high-intensity soft x rays. J. Opt. Soc. Am., B, 3, 1551 1565.
  • 43
    Spears, D.L. & Smith, H.I. (1972) High-resolution pattern replication using soft x rays. Electron. Lett. 8, 102 104.
  • 44
    Spiller, E. (1993) Early history of x-ray lithography at IBM. IBM J. Res. Dev. 37, 291 297. May.
  • 45
    Spiller, E. & Feder, R. (1977) X-ray lithography. X-ray Optics (Topics in Applied Physics 22) (ed by H. J. Queisser), pp. 35 92. Springer-Verlag, Berlin.
  • 46
    Spiller, E., Feder, R., Topalian, J., Eastman, D., Gudat, W., Sayre, D. (1976) X-ray microscopy of biological objects with Carbon Kα and with synchrotron radiation. Science, 191, 1172 1174.
  • 47
    Stead, A.D., Cotton, R.A., Page, A.M., Goode, J.A., Duckett, J.G., Ford, T.W. (1993) The use of soft x-ray contact microscopy using laser-plasmas to study the ultrastructure of moss protonemal cells. X-ray Microscopy IV, pp. 290 296. Proc. 4th Int. Conf., Chernogolovka, Russia, September 20–24.
  • 48
    Tomie, T., Shimizu, H., Majima, T., Yamada, M., Kanayama, T., Kondo, H., Yano, M., Ono, M. (1991) Three-dimensional readout of flash x-ray images of living sperm in water by atomic-force microscopy. Science, 252, 691 693.
  • 49
    Turner, S., Babcock, C., Cerrina, F. (1991) Modeling of shot noise in x-ray photoresist exposure. J. Vac. Sci. Technol. B, 9, 3440 3446.