1365-2818/asset/olbannerleft.gif?v=1&s=3e7715a77e575d8d52121de2f33a3eed8bfd8377)
1365-2818/asset/olbannerright.gif?v=1&s=f1ce9017463b2bf2b5e932f080ebd0d4062983d3)
Software techniques for EELS to realize about 0.3 eV energy resolution using 300 kV FEG-TEM
Article first published online: 11 DEC 2002
DOI: 10.1046/j.1365-2818.2002.01083.x
1365-2818/asset/cover.gif?v=1&s=d7936630b59e5dcb7ae08f77a475d58a10519485 "Journal of Microscopy")
Additional Information
How to Cite
Kimoto, K. and Matsui, Y. (2002), Software techniques for EELS to realize about 0.3 eV energy resolution using 300 kV FEG-TEM. Journal of Microscopy, 208: 224–228. doi: 10.1046/j.1365-2818.2002.01083.x
Publication History
- Issue published online: 11 DEC 2002
- Article first published online: 11 DEC 2002
- Received 26 April 2002;accepted 29 August 2002
- Abstract
- Article
- References
- Cited By
Keywords:
- EELS;
- energy resolution;
- field emission gun;
- script;
- software;
- TEM
Summary
In this short communication we describe some software techniques for electron energy-loss spectrum measurement. We prepared DigitalMicrograph (Gatan) scripts for multiple spectrum acquisitions, quasi-simultaneous acquisition of low-loss and core-loss spectra, energy drift correction, and other operations. Narrow zero-loss spread of 0.27 eV is demonstrated using a 300 kV field-emission transmission electron microscope (TEM) (Hitachi, HF-3000) and a post-column energy filter (Gatan, GIF2002). The core-loss spectrum is acquired with an energy resolution of 0.36 eV with high reproducibility. The present software techniques effectively achieve the intrinsic energy resolution of electron sources. Sample scripts are provided in the Appendix.