Present address: E13 Clark Hall, Department of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, U.S.A.
Nanoscale scanning transmission electron tomography
Article first published online: 19 OCT 2006
Journal of Microscopy
Volume 223, Issue 3, pages 185–190, September 2006
How to Cite
MIDGLEY, P. A., WEYLAND, M., YATES, T. J. V., ARSLAN, I., DUNIN-BORKOWSKI, R. E. and THOMAS, J. M. (2006), Nanoscale scanning transmission electron tomography. Journal of Microscopy, 223: 185–190. doi: 10.1111/j.1365-2818.2006.01616.x
- Issue published online: 19 OCT 2006
- Article first published online: 19 OCT 2006
- Electron tomography;
- scanning transmission electron microscopy high angle annular dark field (HAADF) imaging
Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.