D. Green—contributing editor
Recent Progress in Materials Issues for Piezoelectric MEMS
Article first published online: 6 MAY 2008
© 2008 The American Ceramic Society
Journal of the American Ceramic Society
Volume 91, Issue 5, pages 1385–1396, May 2008
How to Cite
Muralt, P. (2008), Recent Progress in Materials Issues for Piezoelectric MEMS. Journal of the American Ceramic Society, 91: 1385–1396. doi: 10.1111/j.1551-2916.2008.02421.x
- Issue published online: 6 MAY 2008
- Article first published online: 6 MAY 2008
- Manuscript No. 24064. Received December 4, 2007; approved February 3, 2008.
Piezoelectric materials play a crucial role in a large number of devices and applications modern society would not like to miss. Mobile phones and ultrasonic imaging are just the most prominent ones. Since two decades, miniaturization of mechanical devices in silicon technology is a major research direction in engineering known under name of MEMS, which stands for micro-electro-mechanical systems. Piezoelectricity fits very well into this concept and was expected right from the beginning to play its role in MEMS. The breakthrough was made with RF filters in mobile phones working on the principle of standing thickness waves in AlN films. What counts here is acoustic quality and stability. The force champion among piezoelectric thin film materials, Pb(Zr,Ti)O3 gave more problems in processing, and requires more patience to meet requirements and needs for a mass applications. It seems, however, that the breakthrough is imminent. This article attempts to give an overview of the field, highlighting recent achievements, introduce operation principles, and describe some applications.