MgTiO3 (003) Thin Film Deposited on Sapphire (0001) by Sputtering


  • A. Goyal—contributing editor

  • This work was supported by the National Science Council under contract No. NSC 99-2221-E-006-086 and the Center for Micro/Nano Science and Technology.

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This work demonstrates the epitaxy of ilmenite magnesium titanate (MgTiO3) thin films on c-plane sapphire. MgTiO3 thin film with a (003) preferred-orientation was obtained by adjusting the substrate temperature, annealing temperature, and annealing time; (111)-preferring spinel Mg2TiO4 was found when magnesium titanate thin films were deposited at room temperature and then postannealed. X-ray diffraction was used to identify the orientation and quality of the crystal, providing information that is useful in elucidating the epitaxial relationships between the MgTiO3/sapphire and Mg2TiO4/sapphire interfaces. The optical properties of the MgTiO3 were measured, and (003)-preferring MgTiO3 was found to be a good candidate for optical applications.