Fabrication of Micropatterns on Silica Glass by a Room-Temperature Imprinting Method


  • S. Bhandarkar—contributing editor

  • This work was supported by Grant-in Aid for Scientific Research (C) No. 21560701 from Japan Society for the Promotion of Science.

†Author to whom correspondence should be addressed. e-mail: fujino@chem-eng.kyushu-u.ac.jp


A nanocomposite was prepared from fumed silica and PVA. Investigation of the morphology of the composite by TEM and electron energy-loss spectroscopy reveals that the nanocomposite consists of homogeneously dispersed SiO2 nanoparticles and PVA. Micropatterns on the nanocomposite were fabricated by room-temperature imprinting. Micropatterned silica glass was obtained by sintering the nanocomposite at 1100°C in air.