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Fabrication of Micropatterns on Silica Glass by a Room-Temperature Imprinting Method

Authors

  • Hiroshi Ikeda,

    1. Department of Chemical Engineering, Faculty of Engineering, Kyushu University, Fukuoka 819-0395, Japan
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  • Shigeru Fujino,

    Corresponding author
    1. Department of Chemical Engineering, Faculty of Engineering, Kyushu University, Fukuoka 819-0395, Japan
      †Author to whom correspondence should be addressed. e-mail: fujino@chem-eng.kyushu-u.ac.jp
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  • Toshihisa Kajiwara

    1. Department of Chemical Engineering, Faculty of Engineering, Kyushu University, Fukuoka 819-0395, Japan
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  • S. Bhandarkar—contributing editor

  • This work was supported by Grant-in Aid for Scientific Research (C) No. 21560701 from Japan Society for the Promotion of Science.

†Author to whom correspondence should be addressed. e-mail: fujino@chem-eng.kyushu-u.ac.jp

Abstract

A nanocomposite was prepared from fumed silica and PVA. Investigation of the morphology of the composite by TEM and electron energy-loss spectroscopy reveals that the nanocomposite consists of homogeneously dispersed SiO2 nanoparticles and PVA. Micropatterns on the nanocomposite were fabricated by room-temperature imprinting. Micropatterned silica glass was obtained by sintering the nanocomposite at 1100°C in air.

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