J. Smialek—contributing editor
X-Ray Photoelectron Spectroscopy Study on the Interaction of Yttrium–Aluminum Oxide with Fluorine-Based Plasma
Article first published online: 12 MAY 2011
© 2011 The American Ceramic Society
Journal of the American Ceramic Society
Volume 94, Issue 10, pages 3455–3459, October 2011
How to Cite
Kim, D.-M., Lee, S.-H., Alexander, W. B., Kim, K.-B., Oh, Y.-S. and Lee, S.-M. (2011), X-Ray Photoelectron Spectroscopy Study on the Interaction of Yttrium–Aluminum Oxide with Fluorine-Based Plasma. Journal of the American Ceramic Society, 94: 3455–3459. doi: 10.1111/j.1551-2916.2011.04589.x
- Issue published online: 4 OCT 2011
- Article first published online: 12 MAY 2011
- Manuscript No. 29098. Received December 27 2010; approved March 26 2011.
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