This work was partially supported by a grant from the Hewlett Packard Corporation and the Oregon Metals Initiative.
Epitaxial Pb(Zr,Ti)O3 Thin Films on Flexible Substrates
Article first published online: 3 SEP 2011
© 2011 The American Ceramic Society
Journal of the American Ceramic Society
Volume 94, Issue 10, pages 3223–3226, October 2011
How to Cite
Shelton, C. T., Gibbons, B. J. (2011), Epitaxial Pb(Zr,Ti)O3 Thin Films on Flexible Substrates. Journal of the American Ceramic Society, 94: 3223–3226. doi: 10.1111/j.1551-2916.2011.04811.x
- Issue published online: 4 OCT 2011
- Article first published online: 3 SEP 2011
- Manuscript Accepted: 15 JUL 2011
- Manuscript Received: 10 JUL 2011
- Hewlett Packard Corporation
- Oregon Metals Initiative
It is well known that the piezoelectric properties of a thin film can be influenced by crystallographic texture. At the extreme case, epitaxial thin films can be deposited on single crystal substrates (with appropriate lattice matching) to effectively achieve a single crystal thin film. Here, the maximum advantage of orientation dependence is found. Typically this has required small, expensive single crystalline substrates. In the past 10 years, however, the technique of ion beam assisted deposition has been developed for applying a biaxially textured template to an arbitrary smooth surface. This has opened up a new realm of materials integration possibilities, with the prime example being high-temperature superconducting wires. Here, the same template is utilized for deposition of epitaxial Pb(Zr,Ti)O3 thin films onto LaNiO3 and La0.7Sr0.3MnO3-coated flexible substrates. Chemical solution deposition (CSD) is used to produce PZT thin films with very high (00l) orientation and excellent in-plane orientation. Macroscopic ferroelectric measurements depict very square hysteresis behavior, with high remnant polarization of ~40 μC/cm2. Piezoresponse force microscopy and local hysteresis measurements were used to image the microscopic domain structure and to demonstrate the piezoelectric behavior in these materials.