Tunable Microwave Phase Shifters Using LTCC Technology with Integrated BST Thick Films



Low temperature co-fired ceramic (LTCC) reflection and delay line type microwave phase shifters utilizing completely integrated barium strontium titanate (BST) varactors are investigated. Dielectric properties of the screen printed BST paste in 1–8 GHz frequency range are presented. Sintering temperature and time were varied and their effect on the dielectric properties of the film was studied. Phase shifters were sintered at 875°C for 25 min in line with a standard LTCC sintering profile. The relative phase shift of the reflection and delay line type phase shifters were found to be 5 and 11.5° at 2.5 GHz with applied bias field strength of 8 V/μm, respectively.