A- and B-Site Modified Perovskite Nanosheets and Their Integrations into High-k Dielectric Thin Films

Authors

  • Minoru Osada,

    Corresponding author
    1. CREST, Japan Science and Technology Agency, Kawaguchi, Saitama, Japan
    • International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan
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  • Takayoshi Sasaki

    1. International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan
    2. CREST, Japan Science and Technology Agency, Kawaguchi, Saitama, Japan
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  • This work was partly supported by World Premier International Research Center Initiative (WPI Initiative in Materials Nanoarchitectonics), MEXT, CREST, JST, the Industrial Technology Research Grant Program (06A22702d), NEDO, and a Grant-in-Aid for Scientific Research (Fusion Materials 2206), MEXT, Japan.

osada.minoru@nims.go.jp

Abstract

We investigated dielectric properties of perovskite nanosheets with different compositions (Ca2xSrxNb3yTayO10) to study the influence of A- and B-site modifications on dielectric properties. Langmuir–Blodgett deposition was employed to fabricate multilayer nanofilms of perovskite nanosheets. In these nanosheets, the A-site modification by Sr2+ ions causes the increase in εr value, whereas the B-site modification with Ta5+ ions improves leakage current characteristics and reduces permittivity value. The optimized property (εr = 240) is obtained for Sr2Nb3O10 nanosheet. We also discuss high-κ properties of Ca2xSrxNb3−yTayO10 nanosheets by detailed investigations on first-principles calculations and interfacial structures.

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