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Influence of Carbon Content on Surface Quality of Solid-State Sintered SiC Ceramics

Authors

  • Jianqin Gao,

    1. Graduate School of the Chinese Academy of Sciences, Beijing, People's Republic of China
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  • Jian Chen,

    1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, People's Republic of China
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  • Guiling Liu,

    1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, People's Republic of China
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  • Yongjie Yan,

    1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, People's Republic of China
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  • Zhengren Huang

    Corresponding author
    1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, People's Republic of China
    • Graduate School of the Chinese Academy of Sciences, Beijing, People's Republic of China
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  • This work was supported by Science Foundation for Youth Scholar of State Key Laboratory of High Performance Ceramics and Superfine Microstructures under Grant No. SKL201003.

zhrhuang@mail.sic.ac.cn

Abstract

Influence of carbon content on surface quality of solid-state sintered SiC ceramics with nearly full density was first investigated. Comparison study was carried out with varying carbon contents of 2, 3, and 6 wt%, respectively. Investigation on surface morphology using atomic force microscope reveals that residual carbon presents as protuberances on the polished surface. The surface quality of the polished samples was improved by decreasing carbon content, and with 2 wt% carbon, the surface quality can reach 0.7 nm rms surface roughness after polishing. It offers a material-design approach to improve surface quality of solid-state sintered SiC ceramics.

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