Pellet samples of 0–4% weight Ag-loaded WO3 prepared through soft chemical route were sintered at 700°C and exposed to humidity. Resistance of the pellets decreased with increase in relative humidity. Sensitivity increased with increase in the % loading of Ag. Four percent Ag-loaded WO3 showed maximum sensitivity of 2.38 MΩ/% RH in 20–90% relative humidity range. This sensing element manifests highest crystallinity as well as maximum void concentration. Hysteresis and repeatability for this sensing element after 6 months are within ±2%. A polynomial fit of the humidification data revealed a strong correlation between resistance and relative humidity.
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