Radio-Frequency Atmospheric-Pressure Plasma Synthesis of Ultrafine ZrC Powders

Authors

  • Liuyang Bai,

    1. State Key Laboratory of Multi-phase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing, People's Republic of China
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  • Haibao Zhang,

    1. State Key Laboratory of Multi-phase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing, People's Republic of China
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  • Huacheng Jin,

    1. State Key Laboratory of Multi-phase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing, People's Republic of China
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  • Fangli Yuan,

    Corresponding author
    • State Key Laboratory of Multi-phase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing, People's Republic of China
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  • Shulan Huang,

    1. State Key Laboratory of Multi-phase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing, People's Republic of China
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  • Jinlin Li

    1. State Key Laboratory of Multi-phase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing, People's Republic of China
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flyuan@home.ipe.ac.cn

Abstract

A radio-frequency atmospheric-pressure plasma process has been applied to the synthesis of ultrafine ZrC powders using ZrCl4 and CH4 as precursors. Both thermodynamic analysis and experiments were conducted and the as-prepared samples were characterized by X-ray diffraction, electron microscopy, and laser scattering. Results showed that ZrC powders with particle size <100 nm and surface area of 36.56 M2/g could be obtained. The addition of excess H2 contributed to the increase in conversion rate. The conversion rate was about 65% when the carrier gas ratio (H2/CH4) was set at 4.0 and added axially through the injection probe.

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