• Finite Elements;
  • Holography;
  • Modal Analysis;
  • Optical Methods;
  • Nondestructive Testing;
  • Thermal Methods

The main objective of this paper was to propose a novel method for the formation of microstructures using high-frequency excitation during the thermal imprint process. High-frequency excitation of replica during the thermal embossing process helps to fill gaps of the stamp by the polymer. This external factor can provide a possibility to increase the quality and accuracy of the replica. Furthermore, this method does not require expensive or complex developments of the experimental setup and could be applied in most equipments of thermal imprint.