Influence of LNO Top Electrodes on Electrical Properties of KNN/LNO Thin Films Prepared by RF Magnetron Sputtering


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Highly (001) oriented (K,Na)NbO3 (KNN) lead-free piezoelectric thin films were grown on LaNiO3 (LNO)-coated silicon by RF magnetron sputtering. The effects of the top electrodes on the electrical properties of KNN thin films were investigated. The dielectric and piezoelectric properties were remarkably improved in LNO/KNN/LNO (εr = 899 at 1 kHz, d33 = 58 pm/V), compared with that in Pt/KNN/LNO (εr = 584 at 1 kHz, d33 = 26 pm/V). An enhanced ferroelectricity was also obtained in LNO/KNN/LNO, with a remnant polarization of 12 μC/cm2 and a maximum polarization of 23 μC/cm2 at the applied field of 200 kV/cm. Besides, the temperature dependence of piezoelectricity of the films was characterized in this study.