Thermodynamic Analysis on the Codeposition of SiC–Si3N4 Composite Ceramics by Chemical Vapor Deposition using SiCl4–NH3–CH4–H2–Ar Mixture Gases
Article first published online: 12 DEC 2012
© 2012 The American Ceramic Society
Journal of the American Ceramic Society
Volume 96, Issue 3, pages 979–986, March 2013
How to Cite
Xue, J., Yin, X., Ye, F., Zhang, L., Cheng, L. (2013), Thermodynamic Analysis on the Codeposition of SiC–Si3N4 Composite Ceramics by Chemical Vapor Deposition using SiCl4–NH3–CH4–H2–Ar Mixture Gases. Journal of the American Ceramic Society, 96: 979–986. doi: 10.1111/jace.12115
- Issue published online: 17 MAR 2013
- Article first published online: 12 DEC 2012
- Manuscript Accepted: 30 OCT 2012
- Manuscript Received: 7 JUN 2012
- Northwestern Polytechnical University. Grant Numbers: KB200920, B08040
- Natural Science Foundation of China. Grant Number: 50 972 119
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