Member, The American Ceramic Society.
Crystallization Atmosphere and Substrate Effects on the Phase and Texture of Chemical Solution Deposited Strontium Niobate Thin Films
Article first published online: 12 FEB 2013
© 2013 The American Ceramic Society
Journal of the American Ceramic Society
Volume 96, Issue 3, pages 743–749, March 2013
How to Cite
Campion, M. J., Brown-Shaklee, H. J., Rodriguez, M. A., Richardson, J. J., Clem, P. G., Ihlefeld, J. F. (2013), Crystallization Atmosphere and Substrate Effects on the Phase and Texture of Chemical Solution Deposited Strontium Niobate Thin Films. Journal of the American Ceramic Society, 96: 743–749. doi: 10.1111/jace.12193
- Issue published online: 17 MAR 2013
- Article first published online: 12 FEB 2013
- Manuscript Accepted: 25 DEC 2012
- Manuscript Received: 19 SEP 2012
- Laboratory Directed Research
- Development program at Sandia National Laboratories. Grant Number: DE-AC04-94AL85000
Strontium niobate (Sr:Nb = 1:1) thin films were prepared via chemical solution deposition on (001)-oriented SrTiO3, (001)p-oriented LaAlO3, (0001)-oriented sapphire, and polycrystalline alumina substrates. Crystallization in oxygen at 1000°C yielded Sr2Nb2O7 films on all substrates with strong (010) orientation. Films on LaAlO3 and SrTiO3 single-crystal substrates possessed a small amount of preferred in-plane orientation, whereas films prepared on sapphire and polycrystalline alumina substrates were fiber textured. Films crystallized at 900°C in a low oxygen atmosphere (~10−21 atm pO2) formed a randomly oriented polycrystalline perovskite, SrNbO3−δ on all substrates. A similar set of films crystallized at 900°C at a slightly higher oxygen partial pressure (~10−15 atm pO2) was comprised of Sr2Nb2O7 and SrNbO3−δ phases, exposing the dependence of phase formation on oxygen partial pressure. When subjected to a high-temperature anneal in oxygen, the SrNbO3−δ phase is shown to transform into Sr2Nb2O7, however, Sr2Nb2O7 did not significantly reverse transform into SrNbO3−δ after annealing in low oxygen partial pressure atmospheres.