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Crystallization Atmosphere and Substrate Effects on the Phase and Texture of Chemical Solution Deposited Strontium Niobate Thin Films

Authors

  • Michael J. Campion,

    Corresponding authorCurrent affiliation:
    1. Massachusetts Institute of Technology, Cambridge, Massachusetts
    • Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico
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  • Harlan J. Brown-Shaklee,

    1. Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico
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    • Member, The American Ceramic Society.
  • Mark A. Rodriguez,

    1. Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico
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  • Jacob J. Richardson,

    1. Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico
    Current affiliation:
    1. Solution Deposition Systems, Inc., Goleta, California
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  • Paul G. Clem,

    1. Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico
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    • Member, The American Ceramic Society.
  • Jon F. Ihlefeld

    1. Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico
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    • Member, The American Ceramic Society.

Author to whom correspondence should be addressed. e-mail: jihlefe@sandia.gov

Abstract

Strontium niobate (Sr:Nb = 1:1) thin films were prepared via chemical solution deposition on (001)-oriented SrTiO3, (001)p-oriented LaAlO3, (0001)-oriented sapphire, and polycrystalline alumina substrates. Crystallization in oxygen at 1000°C yielded Sr2Nb2O7 films on all substrates with strong (010) orientation. Films on LaAlO3 and SrTiO3 single-crystal substrates possessed a small amount of preferred in-plane orientation, whereas films prepared on sapphire and polycrystalline alumina substrates were fiber textured. Films crystallized at 900°C in a low oxygen atmosphere (~1021 atm pO2) formed a randomly oriented polycrystalline perovskite, SrNbO3−δ on all substrates. A similar set of films crystallized at 900°C at a slightly higher oxygen partial pressure (~10−15 atm pO2) was comprised of Sr2Nb2O7 and SrNbO3−δ phases, exposing the dependence of phase formation on oxygen partial pressure. When subjected to a high-temperature anneal in oxygen, the SrNbO3−δ phase is shown to transform into Sr2Nb2O7, however, Sr2Nb2O7 did not significantly reverse transform into SrNbO3−δ after annealing in low oxygen partial pressure atmospheres.

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