Solution precursor plasma spray was used to deposit cerium oxide coating. This study is to understand the coating deposition mechanism in solution precursor plasma spray for cerium oxide using a cerium nitrate liquid precursor. This study includes the effect of various processing parameters on coating micro structure, such as plasma power, standoff distance, and solution concentration. Single scan experiments were performed to better understand the single splat formation and unpyrolyzed precursor deposition. X-ray diffraction analysis was conducted to determine average crystallite size of the coating from different concentration and formation of single phase cerium oxide formation. Detailed microstructural characterizations of the coatings were carried out by scanning electron microscopy.