D. Zhang, B. Su and T.W. Button Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding Advanced Engineering Materials 5
This paper describes a soft moulding technique for the near net-shape fabrication of three-dimensional (3D) free-standing ceramic structures with dimensions in the micrometer range for application in the micro-electromechanical systems (MEMS). Highly concentrated alumina suspensions have been patterned on thin photoresist layers coated on alumina substrates by the use of soft polymer moulds.
Complete the form below and we will send an e-mail message containing a link to the selected article on your behalf