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D. Zhang, B. Su and T.W. Button Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding Advanced Engineering Materials 5

Version of Record online: 8 JAN 2004 | DOI: 10.1002/adem.200300518

This paper describes a soft moulding technique for the near net-shape fabrication of three-dimensional (3D) free-standing ceramic structures with dimensions in the micrometer range for application in the micro-electromechanical systems (MEMS). Highly concentrated alumina suspensions have been patterned on thin photoresist layers coated on alumina substrates by the use of soft polymer moulds.

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