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Jatinder S. Randhawa, Kate E. Laflin, Natasha Seelam and David H. Gracias Microchemomechanical Systems Advanced Functional Materials 21

Version of Record online: 7 JUN 2011 | DOI: 10.1002/adfm.201100482

Thumbnail image of graphical abstract

Multilayer lithographic methods are used to integrate chemomechanical thin-film actuators as hinges within larger rigid structures, to fabricate devices analogous to microelectromechanical systems (MEMS). Microchemomechanical systems (MCMS) are a class of integrated, miniaturized devices that are actuated on exposure to specific chemical environments. The MCMS approach is especially attractive in enabling wireless and autonomous devices at small size scales. The image shows a microgripper closing spontaneously around an object, in response to chemical stimuli.

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