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Mark A. Lantz, Bernd Gotsmann, Papot Jaroenapibal, Tevis D. B. Jacobs, Sean D. O'Connor, Kumar Sridharan and Robert W. Carpick Wear-Resistant Nanoscale Silicon Carbide Tips for Scanning Probe Applications Advanced Functional Materials 22

Article first published online: 8 FEB 2012 | DOI: 10.1002/adfm.201102383

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A novel process is described whereby the surfaces of nanoscale Si tips are exposed to carbon ions and then annealed to form a strong silicon carbide (SiC) layer. The nanoscale sharpness is largely preserved and the tips exhibit a wear resistance orders of magnitude greater than conventional silicon tips and at least 100-fold higher than monolithic, SiO-doped diamond-like carbon (DLC) tips.

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