Byoung H. Lee, Byunghoon Yoon, Aziz I. Abdulagatov, Robert A. Hall and Steven M. George Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques Advanced Functional Materials 23
Hybrid organic-inorganic films can be grown using molecular layer deposition (MLD) techniques. MLD utilizes sequential, self-limiting reactions to deposit conformal films with atomic level control. Metal alkoxide films known as “metalcones” can be fabricated using metal precursors and organic alcohols. The functional properties of metalcone films can be tuned by varying the relative fraction of their organic and inorganic constituents.
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