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Cédric Rolin, Karolien Vasseur, Björn Niesen, Myriam Willegems, Robert Müller, Sören Steudel, Jan Genoe and Paul Heremans Vapor Phase Growth of Functional Pentacene Films at Atmospheric Pressure Advanced Functional Materials 22

Version of Record online: 27 JUL 2012 | DOI: 10.1002/adfm.201200896

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The effect of carrier gas pressure on the growth of pentacene by organic vapor phase deposition is explored. At high pressures (>100 mbar), gas phase nucleation is observed, which results in rough layers. An optimized process window is defined to grow smooth pentacene thin films at atmospheric pressure. State-of-the-art transistors and circuits based on these films are demonstrated.

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