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Kittitat Subannajui, Andreas Menzel, Firat Güder, Yang Yang, Katrin Schumann, Xiaoli Lu and Margit Zacharias Large-Scale Nano Piezo Force Position Arrays as Ultrahigh-Resolution Micro- and Nanoparticle Tracker Advanced Functional Materials 23

Article first published online: 22 AUG 2012 | DOI: 10.1002/adfm.201201201

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Advanced lithographic processes combined with piezoelectric materials have the potential to fabricate extremely high resolution force position arrays on a large scale. Nanometer-scale piezoelectric lines fabricated on Si wafers by phase-shift lithography and atomic-layer-deposition-based spacer lithography techniques are utilized to enable a new and simple path for devices that define the position with micro- and nanometer resolution.

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