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Wonmo Kang and M. Taher A. Saif In Situ Study of Size and Temperature Dependent Brittle-to-Ductile Transition in Single Crystal Silicon Advanced Functional Materials 23

Article first published online: 7 SEP 2012 | DOI: 10.1002/adfm.201201992

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In situ thermo-mechanical bending tests on single crystal silicon samples are performed with concurrent control of sample size (from 720 nm to 8.7 μm) and temperature (room temperature to 375 °C) using a SiC-based MEMS stage. This study unambiguously shows that the brittle-to-ductile transition temperature reduces with sample size. To interpret the experimental observations, a mechanism-based model is proposed.

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