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Margherita Bassu, Salvatore Surdo, Lucanos Marsilio Strambini and Giuseppe Barillaro Silicon Micromachining: Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring (Adv. Funct. Mater. 6/2012) Advanced Functional Materials 22

Version of Record online: 14 MAR 2012 | DOI: 10.1002/adfm.201290036

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On page 1222, Giuseppe Barillaro and co-workers demonstrate that electrochemical micromachining (ECM) technology allows the fabrication of silicon microstructures with various shapes and silicon microsystems with high complexity to be performed in any research laboratory with sub-micrometer accuracy up to the highest aspect ratio values using dynamical real-time control of the etching anisotropy. False-color scanning electron microscopy (SEM) images of a silicon microgripper fabricated using ECM technology are acquired at different magnifications.

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