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Owen J. Hildreth and Daniel R. Schmidt Vapor Phase Metal-Assisted Chemical Etching of Silicon Advanced Functional Materials 24

Version of Record online: 14 MAR 2014 | DOI: 10.1002/adfm.201304129

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To overcome non-uniformity and microporous silicon generation seen in traditional liquid-phase metal-assisted chemical etching, vapor-phase metal-assisted chemical etching (VP-MaCE) is used instead. The etch rate is evaluated as a function of catalyst, time, and substrate temperature.

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