Kittitat Subannajui, Andreas Menzel, Firat Güder, Yang Yang, Katrin Schumann, Xiaoli Lu and Margit Zacharias Lithography: Large-Scale Nano Piezo Force Position Arrays as Ultrahigh-Resolution Micro- and Nanoparticle Tracker (Adv. Funct. Mater. 2/2013) Advanced Functional Materials 23
Force position arrays which are able to track the position of micro- or nanometer-sized objects require an extremely high spatial resolution down to the nanometer range. On page 191, Kittitat Subannajui, Andreas Menzel, Margit Zacharias, and co-workers report methods which combine advanced lithographic processes and piezoelectric materials on a large scale. The structures are achieved by phaseshift lithography and atomic-layer-deposition-based spacer lithography.
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