Daniel Fine, Alessandro Grattoni, Randy Goodall, Shyam S. Bansal, Ciro Chiappini, Sharath Hosali, Anne L. van de Ven, Srimeenkashi Srinivasan, Xuewu Liu, Biana Godin, Louis Brousseau III, Iman K. Yazdi, Joseph Fernandez-Moure, Ennio Tasciotti, Hung-Jen Wu, Ye Hu, Steve Klemm and Mauro Ferrari Silicon Micro- and Nanofabrication for Medicine Advanced Healthcare Materials 2
Article first published online: 15 APR 2013 | DOI: 10.1002/adhm.201200214
The precision of silicon micro- and nanofabrication is used to create a range of innovative biomedical technologies. This review covers several of these technologies, including nanochannel implants, embedded vectors, nanowires, biocomposite porous silicon(pSi), and porous silica chips. The materials, silicon and its dielectrics, are produced using the high-throughput techniques ubiquitous within the semiconductor industry, with defined nanoscale features that could lead to rapid clinical translation.
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