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D. Bruce Burckel, Joel R. Wendt, Gregory A. Ten Eyck, A. Robert Ellis, Igal Brener and Michael B. Sinclair Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography Advanced Materials 22

Version of Record online: 8 JUN 2010 | DOI: 10.1002/adma.200904153

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A new fabrication approach, self-aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 μm. The composite resonators are oriented on the interior face of approximately-spheroidal cavities, and hence represent the first instance of fabrication of micrometer-scale SRRs with out-of-plane current flow.

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