D. Bruce Burckel, Joel R. Wendt, Gregory A. Ten Eyck, James C. Ginn, A. Robert Ellis, Igal Brener and Michael B. Sinclair Micrometer-Scale Cubic Unit Cell 3D Metamaterial Layers Advanced Materials 22
Membrane projection lithography is used to create vertically oriented split-ring resonators which show measured electric and magnetic resonances (λ = 22, 11, and 7 μm). We then create composite structures with 5 split ring resonators per unit cell (image). This approach provides a long-sought, manufacturable path toward the realization of 3D optical and infrared metamaterials.
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