Jun Ho Son, Jong Uk Kim, Yang Hee Song, Buem Joon Kim, Chul Jong Ryu and Jong-Lam Lee Design Rule of Nanostructures in Light-Emitting Diodes for Complete Elimination of Total Internal Reflection Advanced Materials 24
Cone-shaped nanostructures with controllable side-wall angle are success- fully fabricated with a SiO2 nanosphere lithography (NSL) etching mask. Vertical LEDs with cone-shaped nanostructures with a 24.1° side-wall angle provide 6% more light output power compared to those using hexagonal pyramids formed by photochemical etching. This achievement is attributed to effective elimination of total internal reflection by angle-controlled nanostructures.
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