Isabelle Staude, Manuel Decker, Michael J. Ventura, Chennupati Jagadish, Dragomir N. Neshev, Min Gu and Yuri S. Kivshar Hybrid High-Resolution Three-Dimensional Nanofabrication for Metamaterials and Nanoplasmonics Advanced Materials 25
We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.
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