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Ye Tao and Christian Degen Facile Fabrication of Single-Crystal-Diamond Nanostructures with Ultrahigh Aspect Ratio Advanced Materials 25

Version of Record online: 25 JUN 2013 | DOI: 10.1002/adma.201301343

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A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.

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