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Jonathan P. Singer, Pao-Tai Lin, Steven E. Kooi, Lionel C. Kimerling, Jurgen Michel and Edwin L. Thomas Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient Advanced Materials 25

Article first published online: 21 AUG 2013 | DOI: 10.1002/adma.201302777

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A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.

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