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Vaida Auzelyte, Benjamin Gallinet, Valentin Flauraud, Christian Santschi, Shourya Dutta-Gupta, Olivier J. F. Martin and Juergen Brugger Large-Area Gold/Parylene Plasmonic Nanostructures Fabricated by Direct Nanocutting Advanced Optical Materials 1

Version of Record online: 31 JAN 2013 | DOI: 10.1002/adom.201200017

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High-resolution multilayer plasmonic nanostructures are made in a single fabrication step by nanocutting a gold and parylene C bilayer.. A silicon stamp is used to cut the gold film and vertically displace the nanocut shapes into the polymer. Periodic Au nanopatterns in single and double-layer configurations are fabricated down to the sub-100 nm range, supporting plasmon resonances in the visible range.

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