Anne M. Ruminski, Giuseppe Barillaro, Emilie Secret, Winnie D. Huang, Andrea Potocny, Ulysse Carion, Charles Wertans and Michael J. Sailor Topological Control of Porous Silicon Photonic Crystals by Microcontact Printing Advanced Optical Materials 1
Conformal etching of 3D porous photonic structures into silicon. When a silicon wafer containing a surface relief grating is etched with the appropriate anodic electrochemical waveform, a photonic multilayer results that is conformal with the undulations of the silicon surface. The structure displays both diffraction and an optical stop band. The 3D porous structure can be removed, preserving the surface relief through at least 6 generations of electrochemical etch.
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