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Xianliang Liu and Willie J. Padilla Dynamic Manipulation of Infrared Radiation with MEMS Metamaterials Advanced Optical Materials 1

Version of Record online: 18 JUN 2013 | DOI: 10.1002/adom.201300163

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An electrically tunable MEMS metamaterial that effectively manipulates radiation in the mid-infrared wavelength range is experimentally demonstrated. The metamaterial consists of an array of suspended metal-dielectric elements above a metal ground plane on a carrier substrate. A voltage applied between the metallic metamaterial array and the bottom ground plane layer permits adjustment of the distance between them, thus greatly altering the electromagnetic properties.

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