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S. Xu, S. Y Huang, I. Levchenko, H. P. Zhou, D. Y. Wei, S. Q. Xiao, L. X. Xu, W. S. Yan and K. Ostrikov Highly Efficient Silicon Nanoarray Solar Cells by a Single-Step Plasma-Based Process Advanced Energy Materials 1

Version of Record online: 12 APR 2011 | DOI: 10.1002/aenm.201100085

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Highly efficient solar cells (conversion efficiency 11.9%, fill factor 70%) based on the vertically aligned single-crystalline nanostructures are fabricated without any pre-fabricated p-n junctions in a very simple, single-step process of Si nanoarray formation by etching p-type Si(100) wafers in low-temperature environment-friendly plasmas of argon and hydrogen mixtures.

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