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Meike V. F. Schlupp, Julia Martynczuk, Michel Prestat and Ludwig J. Gauckler Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by Aerosol-Assisted Chemical Vapor Deposition Advanced Energy Materials 3

Version of Record online: 30 OCT 2012 | DOI: 10.1002/aenm.201200596

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Scanning transmission electron microscopy and cross plane conductivity measurements are used to detect the presence of nanoporosity in granular yttria stabilized zirconia thin films prepared by aerosol assisted chemical vapor deposition. By reducing the metal content of the precursor solution or the solution throughput, dense columnar thin films are obtained at temperatures as low as 450 °C.

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